polymer advanced technology|Microelectronics Technology: Polymers for Advanced Imaging and Packaging (Acs Symposium Series) Reviews
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polymer advanced technology|Microelectronics Technology: Polymers for Advanced Imaging and Packaging (Acs Symposium Series)
Provides an up-to-date assessment of chemically amplified resist materials chemistry and process considerations. Reports novel chemistry for single layer 193nm lithographic applications. Discusses new approaches to silicon-containing resists and multilevel processes. Explores the design of low-dielectric polymer materials for microelectronic applications.
List Price: $ 79.50
Price: $ 21.85
